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Infomation of Course

Program Common [공통(상호인정)] Course Type Major Elective [ 전공선택 ]
Course Code 39.473 Course No CBE473
Section English
L:L:C(AU) 3:0:3.0(0) Exam time
- Mon: 13:00~15:45
Course Title Microelectronics Processes [ 미세전자공정 ]
Class time
Mon: 13:00~14:30 / (W1-3)Dept. of Chemical & Biomolecular Engineering [ (W1-3)생명화학공학과 ] (2116)
Wed: 13:00~14:30 / (W1-3)Dept. of Chemical & Biomolecular Engineering [ (W1-3)생명화학공학과 ] (2116)

Information of Professor

Name 우성일(Woo, Seong Ihl)
Department 생명화학공학과(Department of Chemical and Biomolecular Engineering)
Phone 042-350-3918

Plan of Lecture

Syllabus File Syllabus_CBE473.hwp
Syllabus URL
Summary of Lecture The representative unit process for microelectronic process such as epitaxial growth, CVD, diffusion, thermal oxidation et al. were introduced. It will be explained how these unit process are assembled to manufacture microelectronic devices.
Material for Teaching
Textbook: Fabrication Engineering at the Micro- and Nano scale, 3rd Ed.,
Oxford University Press (2008).
Evaluation Criteria Grading: Mid-term exam (40%), Final Exam (40%), Term paper (10%), HW (10%).
Lecture Schedule 1st week: Introduction
2nd week: Semiconductor Substrate
3rd week: Diffusion
4th week: Thermal Oxidation
5th week: Ion Implantation
6th week: Rapid Thermal Processing
7th week: Optical Lithography.
8th week: Photoresist
9th week: Etching
10th week: Evaporation and Sputtering
11th week: Chemical Vapor Deposition
12th week: Epitaxial Growth
13th week: Isolation, Junction and Metallization
14th week: CMOS Technology